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A design method of multiphase Dammann grating beam splitter based on simulated annealing algorithm is proposed to address the problems of low diffraction efficiency and optical intensity uniformity of the conventional Dammann grating beam splitter. Based on the scalar diffraction theory, the phase structure design of the multiphase Dammann grating beam splitter is investigated. Based on the original binary mutation point coordinates, a simulated annealing algorithm is used to discretize and modulate the phase structure of the grating within one cycle, and a reasonable control objective function is used to optimize the phase structure design. Next, the design of the dislocation structure of a 9×9 point Dammann grating beam splitter is simulated, and a dislocation grating with diffraction efficiency of 85.3%, optical intensity inhomogeneity of 0.0952%, and root mean square error of 8.2×10-5 is obtained. The results show that the method is superior and practical, and provides a theoretical basis for the generation of structured light for 3D measurement in practical applications.