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In order to solve the problems of large volume and redundant computing resource waste of MEMS gyroscope, the data processing capability and bus architecture of Cortex-M3 core are studied, and an intelligent, miniaturized and low-power system-on-chip (SoC) for MEMS gyroscope is designed; By analyzing the influence of temperature on the output signal of the gyroscope, the intelligent compensation method of the temperature error of MEMS gyroscope is studied. The method of integrated design with Cortex-M3 as the core, capacitance/voltage conversion circuit, analog-to-digital converter (ADC) and other modules is adopted to reduce the volume of the gyroscope under the same function; Configure the storage space and communication interface according to the requirements of MEMS gyroscope for signal processing resources, using 0.18μm BCD processing technology is used to design and manufacture the SoC; The test results show that after the SoC, which is designed for the matching of MEMS gyroscope, performs temperature compensation processing on the output signal of the gyroscope, the zero deviation variation in the full temperature range (-40 ℃~85 ℃) is reduced from3.147 °/s to0.035 °/s, significantly improving the full temperature measurement accuracy of MEMS gyroscope.