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壓電陶瓷驅動(dòng)器遲滯非線(xiàn)性誤差的建模與分析
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Modeling and Analysis of Hysteresis Nonlinear Error of Piezoelectric Ceramic Actuator
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    摘要:

    壓電陶瓷驅動(dòng)器的最大遲滯非線(xiàn)性誤差可以超過(guò)輸出行程的15%,而快刀伺服系統(FTS,Fast Tool Servo)要求重復定位精度優(yōu)于10nm,相對線(xiàn)性度誤差優(yōu)于0.5%,壓電陶瓷驅動(dòng)器的誤差無(wú)法滿(mǎn)足該精度要求。首先對壓電陶瓷遲滯非線(xiàn)性誤差進(jìn)行實(shí)驗分析,將遲滯非線(xiàn)性誤差分為頻率無(wú)關(guān)遲滯現象和頻率相關(guān)遲滯現象。接著(zhù)對Bouc-Wen(BW)和Prandtl-Ishlinskii(PI)的頻率無(wú)關(guān)遲滯模型進(jìn)行修正和對比,確定了采用PI模型描述本文的頻率無(wú)關(guān)遲滯現象,PI模型對頻率無(wú)關(guān)遲滯曲線(xiàn)的辨識精度為0.392%。然后設計基于Hammerstein模型的頻率相關(guān)遲滯模型,Hammerstein模型對頻率相關(guān)遲滯曲線(xiàn)的辨識誤差相比PI模型時(shí),其均方根值降低了88.068%。提出了壓電陶瓷驅動(dòng)器遲滯非線(xiàn)性誤差的建模方法,并分析了其有效性和準確性,給FTS伺服控制提供了一種實(shí)用的前饋控制器。

    Abstract:

    The maximum hysteresis nonlinear error of the Piezoelectric ceramic actuator can exceed 15% of the output displacement. For the fast-tool-servo (FTS) system, the repeated positioning accuracy is better than 10nm and the relative linearity error is better than 0.5%, the above errors bring great challenges. In this paper, the hysteresis nonlinear error of piezoelectric ceramics is experimentally analyzed, and the hysteresis nonlinear error is divided into frequency-independent hysteresis phenomenon and frequency-dependent hysteresis phenomenon. Then, the frequency-independent hysteresis models of Bouc-Wen (BW) and Prandtl-Ishlinskii (PI) are revised and compared, and it is determined that the PI model is used to describe the frequency-independent hysteresis phenomenon in this paper. The identification accuracy of the PI model for the frequency-independent hysteresis curve is 0.392 %. Then a frequency-dependent hysteresis model based on the Hammerstein model is designed. Compared with the PI model, the root-mean-square value of the Hammerstein model's identification error for the frequency-dependent hysteresis curve is reduced by 88.068%. In this paper, a modeling method of hysteresis nonlinear error of piezoelectric ceramic actuator is proposed, and its validity and accuracy are analyzed, which provides a practical feedforward controller for FTS servo control.

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王義冬,李慶春,趙慧.壓電陶瓷驅動(dòng)器遲滯非線(xiàn)性誤差的建模與分析計算機測量與控制[J].,2023,31(2):196-203.

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  • 收稿日期:2022-09-28
  • 最后修改日期:2022-11-08
  • 錄用日期:2022-11-09
  • 在線(xiàn)發(fā)布日期: 2023-02-16
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