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基于機器視覺(jué)的硅錠端面隱裂檢測方法
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江南大學(xué)

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Silicon Ingot End Face Crack Detection Method Based on Machine Vision

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    摘要:

    硅錠在生產(chǎn)過(guò)程中難以避免有端面隱裂的發(fā)生,嚴重影響生產(chǎn)線(xiàn)的安全性能和生產(chǎn)效率,為此提出一種改進(jìn)背景差分算法的硅錠端面隱裂自動(dòng)檢測方法和系統。首先,分析端面隱裂的特點(diǎn),采用中值濾波來(lái)對圖像進(jìn)行預處理;其次,采用圖片樣本庫訓練得到背景圖像并對常用差分算法進(jìn)行改進(jìn),在對圖像進(jìn)行差分的同時(shí)增強隱裂缺陷;再根據隱裂缺陷的最大比例不超過(guò)10%進(jìn)一步去除差分圖片中的大部分背景點(diǎn);最后再提取隱裂缺陷區域,對區域進(jìn)行連通域分析并根據缺陷區域面積來(lái)判斷端面是否隱裂。仿真結果和現場(chǎng)實(shí)踐表明,該方法對硅碇隱裂的識別準確率達96.4%,召回率達98.5%,識別時(shí)間低于200ms,很好地滿(mǎn)足現場(chǎng)運行的需求。

    Abstract:

    It is difficult to avoid the occurrence of end face crack of silicon ingot in the production process, which seriously affects the safety performance and production efficiency of the production line. Therefore, an improved background difference algorithm for automatic detection of end face crack of silicon ingot is proposed. Firstly, the characteristics of the end face crack are analyzed, and the median filter is used to preprocess the image; Secondly, the background image is trained by the image sample library and the commonly used difference algorithm is improved to enhance the crack defect while performing the difference on the image; Then, most of the background points in the difference picture are further removed according to the maximum proportion of crack defects not exceeding 10%; Finally, the cracked defect region is extracted, and the connected region is analyzed to determine whether the end face is cracked according to the area of the defect region. The simulation results and field practice show that the recognition accuracy of this method is 96.4%, the recall rate is 98.5%, and the recognition time is less than 200ms, which meets the needs of field operation.

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朱毅,嵇小輔.基于機器視覺(jué)的硅錠端面隱裂檢測方法計算機測量與控制[J].,2023,31(4):36-41.

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歷史
  • 收稿日期:2022-09-04
  • 最后修改日期:2022-10-03
  • 錄用日期:2022-10-08
  • 在線(xiàn)發(fā)布日期: 2023-04-24
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