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In the prior art, the SF6 gas leakage concentration in the GIS equipment of the substation is relatively large, and the detection accuracy is low. This paper designs a TMS+XD chip to improve the performance of the patrol robot, uses the ion migration method to design the SF6 detection technology, and uses the SF6 concentration analysis provided by the scanning window Ion spectroscopy can more accurately determine the law of gas leakage; the differential energy detection (Differential Energy Detection DED) algorithm and probabilistic formula are used to master the SF6 gas leakage concentration, and then the optimal filling range can be worked out to increase the safety of the GIS equipment in the substation. The test shows that the leakage concentration of SF6 output by the detection system of this research is 15.8mol/ml, the detection accuracy is 92.5%, the leakage concentration of SF6 gas is small, and the detection accuracy is high.