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In view of the rapid development of the domestic IC industry, the hardware platform of the integrated automatic test system for VLSI was developed based on analyzing the requirements of IC testing. Firstly, the overall architecture scheme of the hardware platform based on PXIe bus was designed. Secondly, high-performance PXIe test instruments including digital test modules were developed, and the testing sub-system was further constructed and system integration was completed. A high-performance external instrument and a self-checking and calibration subsystem were used to test the hardware platform, and the test and verification were carried out based on BM3110MPB. The test verification results show that the hardware platform digital test single channel maximum test rate is 1600Mbps, DPS can achieve the maximum output voltage of 12V, the maximum output current of 800mA, with connectivity test, functional test, DC parameters and AC parameters test and other functions. The hardware platform can effectively meet the needs of domestic VLSI testing in the future.