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In view of the low detection accuracy of some historical switchgear latent fault diagnosis methods, a new switchgear fault diagnosis system is designed in this study. A physicochemical monitoring technology is used to detect the cause of switchgear fault by analyzing the decomposition products of sulfur hexafluoride (SF6), and the ion migration method is used to analyze the SF6 ion in the environment, Then master the gas situation in the switchgear of the substation, analyze the detection data through the differential energy detection algorithm, calculate the impact of gas leakage on the switchgear of the substation, and formulate the optimal SF6 filling range, so as to provide help for the safe operation of the switchgear. The simulation results show that the average accuracy of the detection data is high, and the maximum accuracy is 92.5%, which reflects the superiority of the physical and chemical detection method based on SF6 gas decomposition.