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In order to solve the problem of error accumulation caused by noise and drift, aiming at the static performance of gyroscope and the dynamic performance of accelerometer, a stability measurement system for camera tripod based on six-axis MEMS device is presented. The principle of MEMS device, hardware system and software system are introduced, the detection hardware system based on ADXR450 GYROSCOPE and Adxl355 accelerometer is designed, the angular acceleration information is acquired by sensors, and the output results are analyzed by different filtering methods, compare Kalman filter and first order RC digital filters. By comparison, the Kalman filter filter has better real-time performance and better dynamic response. The experimental results show that the system is more suitable for first-order filtering in static state, and the angle error of attitude measurement is less than 0.104 °.