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In the process of thin film production, random faults will occur due to the failure of modules or components. In order to reduce the occurrence of faults and ensure the safe and efficient operation of the equipment, through sampling and analyzing the key unit vibration, using the fault detection method based on correlation kurtosis, the maximum third-order correlation kurtosis (m3ckd) deconvolution inverse filter is designed. The maximum third-order correlation kurtosis of real-time data sequence is taken as the cost function to extract and identify the vibration signal peak value of the unit To identify and locate the fault signal. The algorithm performance verification results show that the algorithm is feasible and operable, and the algorithm has fast convergence speed and good stability, and can effectively identify fault signals, which is suitable for the actual thin film production line industrial production process.