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A digital phase shifter for RF acceleration of high energy ion implanter based on stm32f405rgt6 microprocessor and AD9959 is designed. Firstly, the system composition and working principle of the phase shifter and how to realize the phase control of RF power supply in the multicavity RF acceleration system of high energy ion implanter are introduced. Then the hardware circuit principle and control software design of microprocessor, DDS chip AD9959 and clock distribution chip ad9510 are introduced in detail. The experimental results show that the phase shifter realizes 16 channel sinusoidal signal output, and the resolution of output waveform frequency and phase value is up to 0.02Hz and 0.05 ° respectively, and it can adjust and set the phase difference between any two channels. The phase shifter has simple structure, stable and reliable performance, and can meet the phase control requirements of the RF power supply in the multicavity RF acceleration system of the high energy ion implanter.