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Acceleration sensor has been widely used in military, industrial, environmental monitoring and other fields, which has become a hot research object, But the miniaturization and reliability of the device becomes an important bottleneck to limit the development of the technology. Therefore, downsizing the signal processing circuit for a novel silicon based MEMS accelerometer, This paper presents an on-chip integrated operational amplifier circuit based on CMOS, which is fully compatible with MEMS. A preamplifier with low power consumption, low noise and accuracy is designed by extracting the performance parameters of the relevant acceleration sensor. At the same time, the main circuit characteristics and power consumption of the integrated instrumentation amplifier are simulated and analyzed. From the results, the design of the three-amplifier instrumentation amplifier key parameters - common mode rejection ratio can reach 101dB, the overall performance is good. Completed the simulation results of the layout design and verification. And then in the CSMC 0.5 μm CMOS standard process line on the film, completed the chip packaging test.The test results show that the op amp's gain can reach 42 dB, power consumption is only 5.25 mW, in line with the expected design goals.