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The design results of low scattering carrier are determined by the scattering level of measured object. In order to implement detailed stealth design and obtain the scattering level of steps and gaps, the design methods of low scattering carrier used for RCS measurement of steps and gaps were proposed.Multilevel fast multipole algorithm (MLFMA) was appliedand the impacts of combination manner of adjacent surface, location, tapering ratio, and fillet radius on the scattering level were analyzed. The simulation results demonstrated that it could effectively reduce scattering level to reduce curvature fluctuation, increase tapering ratio, and reduce fillet radius. The steps and gaps should be located in the surface instead of the plane due to the fact that the scattering level of the surface was less than that of the plane. The method is of guidance meaning for the design of low scattering carrier in RCS measurement.