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A design method of small integrated circuit test system based on precise measurement unit is presented in this paper, and the small power range is verified in detail. The test system the voltage / current clamp technique, comparison of technology, power expansion constant current source and voltage source and four quadrant drive technology, the combination of technology, to the device under test (DUT) applied to precisely and accurately measure the DUT value of the incentive, incentive in the response of the system at the same time. With high power capacity expansion to meet the various needs of the test circuit. The four channel system with integrated instrument amplifier circuit, combining extension circuit and PC control interface to accomplish the design of embedded controller, power, solve the nA current cannot be accurately measured, by optimizing the compensation circuit design, improve the testing speed of circuit. The analysis results show that the performance of the system, integrated circuit test system in the design of high precision, stable and reliable excitation and fast response speed, cost saving compared to 2/3 hardware design of similar products, to meet the integrated circuit DC parameter test requirements.