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Evaluation of measurement uncertainty of shape and position error is a hotspot in the field of measurement. However, due to the complexity of measurement and the diversity of measurement results, the uncertainty of the measurement of the shape and position error in the actual measurement results has become a difficult problem. Therefore, according to the evaluation criterion of shape error, establish mathematical model adopting least squares method, determining the transfer coefficient of each parameter value of the shape error mathematical model and single point uncertainty, and uncertainty analysis of measurement methods and the specific process of the source, according to the traditional GUM method for uncertainty evaluation. Then the Monte Carlo pseudo random number method is used to simulate the actual measurement data, thus the flatness error uncertainty is obtained. The reliability and accuracy of Monte Carlo method to evaluate flatness uncertainty are verified by setting experimental comparison. This method does not need to calculate the transfer coefficient of mathematical model, it is easy to realize by using Matlab software, and provides a more convenient method for the uncertainty evaluation of flatness error measurement results.