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The rotary error of precision centrifuge affects directly dynamic radius measurement, the acceleration precision outputted by precision centrifuge and the safety of spindle working, it must be measured accurately. The application of capacitance micrometer test with three-point method to separate rotary error and roundness error is introduced. Also, the installation angle error of three capacitance micrometers, the sampling numbers of spindle lap and the test system background noise influence rotary error measurement result are simulated in MATLAB. The influences to rotary error separation caused by sampling N, δα, δβ and noise of test system are obtained. Thus, several technique parameters in rotary error test for 10-6 level high precision centrifuge are certified. This technique has been applied to the spindle rotary error test of high precision centrifuge, the measurement result shows that using this measurement technique, the pure rotary error of spindle is 0.25 μm within speed of 300 rpm, the measurement result satisfies the requirement of the high precision centrifuge technique indicators. 