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The capacitor style and electrode distance variance liquid level pressure sensor is talked about.Analyze the operation principle and the features of the sensor’s measuring circuit. Fault diagnosis uses the change rate of the pressure to judge the existence of the measure circuit fault at first. Make the bridge output signal and the operational amplifier output signal as the two detection signals. Then two detection signals’ expressions in rated input are acquired.The expressions’ arguments are all circuit elements.Since different elements can influence the detection signals differently in their numerical drift fault severally, the fault location accurate to single element can be realized.Substitute the value of the normal elements value into the detection signals’ expressions to simultaneous and solve the equations.Thus realize the fault evaluation accurate to single element.The simulation shows the value of the fault diagnosis is very close to the true value.