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An approach of robot collision protection based on reactive torque observation is presented. Reactive torque is estimated by the disturbance observer based on the model of the system, which including motor torque model and robot dynamic model. Because of the special structure and joint coupling relationship of clean-room robot, the dynamics of robot is greatly simplified, and simplified model is identified by the least squares method which improved the precision of the model. According to the torque of permanent magnet synchronous motor and dynamic of the robot, joint torque based on motor current can be getted. When robot contact with the external environment, the increasion of the joint torque is the reaction torque, which is used to implement the active compliance control combined with disturbance observer and the force/position hybrid control. At last, collision protection experiment is carried out on the clean-room robot, and the experimental results verify the effectiveness of the proposed method. 