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In view of the problems of micro capacitance measurement in electrical capacitance tomography technology, micro capacitance measurement system is designed, which is based on digital phase sensitive detection principle and the core of LabVIEW and NI acquisition card. The excitation signal produced by NI acquisition card which is controlled by the LabVIEW program is loaded on the capacitance, and the capacitance is converted into voltage signal by the C/V converting circuit, and the voltage signal is changed to data by NI data acquisition card which is controlled by LabVIEW program and passed on to PC, and the digital phase sensitive detection algorithm can be realized in LabVIEW program, and then the data can be displayed. In the end, the corresponding capacitance value is obtained by linearization of the data. Experimental results show that the system has the advantages of high precision, good linearity, good stability, and can meet the requirements of micro capacitance measurement in electrical capacitance tomography system.