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Since the structure size of the concerned sensor chip is mutually restricted with the performance of high-g MEMS accelerometer, such as the sensitivity and frequency, under the condition of the required strength and natural frequency of the sensor chip, try to improve the sensor sensitivity through size optimization, thus to improve the comprehensive performance of the sensor. After many times simulation of the diaphragm thickness and the central proof mass of the sense chip using the ANSYS software, the model size of the sensor chip is optimized according to groups of simulation data. It is verified by high-g experiments that the optimized sensor can satisfy the experimental requirement, and has high sensitivity. 