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In the thermal resistance based temperature measurement, the measure accuracy will greatly decreased due to component difference and drift. To solve this problem, a four resistances self calibration technique is proposed. The resistance value of the thermal resistance is obtained by comparing the relative amplitude of the four gauged signals, and then the temperature is calculated. The advantage of the proposed method lies in the drift in the circuit and the component difference will be offset, thereby realizing high-precision temperature measurement in different temperature environment. By comparing the measured data Metrology, measurement error is less than 0.063 ℃, demonstrate the effectiveness and accuracy of the method.